MULTILAYER X-RAY MIRRORS
Multilayer Mirrors for Soft X-rays
| W/Si W/C WC/Si W/B4C |
Cr/Sc W/Sc |
Ni/C Cr/C W/C CrB2/C Co/C |
Mo/B4C Mo/B13C2 Mo2B5/B4C |
Mo/Si MoSi2/Si | W/Si WSi2/Si |
Os/Si Sc/Si |
| wavelength, Å |
| Material system | d-spacing, nm | number of periods | reflectivity, % | resolution, % | wavelength, nm |
| W/Si | 1.3-4 | 100-300 | 15-75 | 1-5 | 0.154 |
| W/B4C | 1.7 | 400 | 40 | 0.6 | 0.154 |
| Cr/Sc | 2-5 | 80-200 | 5-40 | 0.65-2.6 | 0.154 |
| W/Sc* | 1.6 | 130 | 3.3 | 0.85 | 3.16 |
| Ni/C | 5-8 | 60 | 85-90 | 4-5 | 0.154 |
| Cr/C | 2-5 | 40-300 | 5-25 | 1-5 | 0.154 |
| W/C | |||||
| Mo/B4C | 2.4–10 | 40–250 | 60–80 | 1.5–9.5 | 0.154 |
| Mo/Si | 6.5–15 | 20–40 | 75–80 | 0.154 | |
| Mo/Si* | 6.9 | 40 | 58 | 2.5 | 13.4 |
| W/Si* | 12 | 30 | 24 | 3 | 23.4 |
| Sc/Si* | 21.3 | 8 | 50 | 9 | 36.5 |
| Co/C | 2-8 | 10-300 | 10-35 | 0.6-7 | 4.5 |
| Co/C* | 2.25 | 200 | 14 | 0.7 | 4.5 |
| W/Sc | 1.6-3.0 | 100-300 | 25-60 | 1-3 | 0.154 |
| WC/Si | 3 | 150-200 | 70 | 2.5 | 800 |
| Mo2B5/B4C | 8.3 | 40 | 77 | 5.2 | 1400 |
| (*) - Normal incidence mirrors . Multilayers can be deposited on a flat or a spherical substrate with the diameter 100 mm or less with the curvature radius more than 20 mm . The accuracy of reflectivity peak position is: ± 0.5 % for mirror’s diameter 20 mm ± 0.7 % for mirror’s diameter 40 mm ± 1 % for mirror’s diameter 55 mm |
Multilayers X- ray mirrors with enhanced thermal stability.
| Material system | d-spacing, nm | number of periods | reflectivity (wavelength =0.154 nm), % | resolution, % | ultimate working temperature,K |
| WSi2/Si | 3 | 150 | 70 | 2.3 | 900 |
| CrB2/C | 5 | 50 | 65 | 3.1 | 1100 |
| MoSi2/Si | 8 | 40 | 82 | 6.5 | 1000 |